Thin Films Technology: Practical Manual for the Laboratory Works
AUTHOR | Alexander Axelevitch; Alexander Axelevitch; Axelevitch, Alexander et al. |
PUBLISHER | World Scientific Publishing Company (11/26/2021) |
PRODUCT TYPE | Hardcover (Hardcover) |
Description
This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.
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Product Format
Product Details
ISBN-13:
9789811246326
ISBN-10:
9811246327
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
More Product Details
Page Count:
236
Carton Quantity:
30
Product Dimensions:
6.00 x 0.56 x 9.00 inches
Weight:
1.07 pound(s)
Country of Origin:
SG
Subject Information
BISAC Categories
Technology & Engineering | Materials Science - Thin Films, Surfaces & Interfaces
Technology & Engineering | Electronics - Semiconductors
Technology & Engineering | Physics - Condensed Matter
Descriptions, Reviews, Etc.
publisher marketing
This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.
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List Price $88.00
Your Price
$87.12